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Taiwan Semiconductor Research Institute

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Materials Analysis Services

The Laboratory offers high-quality testing and analysis services, conducts talent training, and is engaged in the R&D of advanced testing technologies and methods. In addition to the stand-alone service functions of major instruments, we also provide integrated analysis services and customized specimen preparation services that deliver complete and fast analysis results. Our current technical services can be divided into the following four categories:

  1. Scanned Image Analysis Technologies:
    Including the Atomic Force Microscope (AFM), Scanning Capacitance Microscopy (SCM), Conductive Atomic Force Microscopy (CAFM), Scanning Transmission Electron Microscopy (STEM).
     
  2. Surface Chemical and Spectrometric Analysis Technologies:
    Including the Secondary Ion Mass Spectrometer (SIMS), X-ray Photoelectron Spectroscopy (XPS), Micro-Fourier Transform Infrared Spectroscopy (Micro-FTIR), and Micro-Raman Spectroscopy (Micro-Raman).
     
  3. Crystal Structure Diffraction Analysis Technologies:
    Including the high-resolution Transmission Electron Microscopy (TEM) and X-ray Diffraction Analysis (XRD).
     
  4. Material Mechanical Property and Electrical Characterization Technologies:
    Including the Nanoindenter and Electrical Characterization of Semiconductors at Atomic-level Resolution.
     
Moreover, with the aim of further promoting our laboratory operation quality and efficiency, highlighting our proficiency, and improving the credibility of our test results, our laboratory for material analysis and measurement has been accredited by the TAF to ISO17025:2005 as a Testing Laboratory, demonstrating that our laboratory has international-level test capability and is at the same technical level as laboratories accredited by 67 countries and 81 accreditation bodies around the world.
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Customer Service:tsri-cs@niar.org.tw ext:7610
  • Hsinchu Base
    No.26, Prosperity Road I, Hsinchu Science Park, Hsinchu 300091, Taiwan, R.O.C.
    TEL. +886-3-5773693FAX. +886-3-5713403
  • Tainan Base
    No.25, Xiaodong Road, Tainan City 704017, Taiwan, R.O.C.
    TEL. +886-6-2090160FAX. +886-6-2086669
  • NCKU Chimei Office
    7F, Chimei Building, Tzu-Chiang Campus, No.1, University Road, Tainan City 701401, Taiwan, R.O.C.
    TEL. +886-6-2087971FAX. +886-6-2089122
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