Monolithic Z-Axis Displacement CMOS MEMS Accelerometer
Sensor
The present invention is a monolithic Z-axis displacement accelerometer structure formed by a CMOS and a MEMS. The structure includes a matching frame, two anchors, a first comb structure, a second comb structure, and a proof mass. With the implementation of the present invention, the unsymmetrical structure body of the Z-axis displacement CMOS MEMS accelerometer and the equal impedance of the first comb structure and the second comb structure can improve the sensitivity of the accelerometer and the symmetry of the signal sensed by the accelerometer. In addition, the feasibility of applying a second etching process to the front of the CMOS and the MEMS, i.e., the opposite side of the semiconductor bottom substrate, can further improve the ease and yield of production.
- Country: United States
- Patent No.: 9702894B2Download
- Country: Republic of China
- Patent No.: I580967Download